---
title: The Characterization of TiNi Shape-Memory Actuated Microvalves Technical Paper
description: Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications.
---

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Technical paper

## The Characterization of TiNi Shape-Memory Actuated Microvalves

 Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications in MEMS. The stress evolution of TiNi films will be described. The performance of the TiNi actuators has been characterized, with regards to actuation force, recoverable strain, time response, and fatigue resistance. The performance of microvalves using these actuators will also be presented.

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