6 Benefits of Plasma Emission Monitoring (PEM)


The PEM is a type of in-situ control that manufacturers can use to observe the thin film deposition process and produce more repeatable thin films for their applications.

In this infographic, you'll discover:

  • How PEM can be used to increase the yield of metal oxide and nitride thin films during reactive sputtering
  • The importance of bistable operation and controlling reactive gas flow during deposition
  • The benefits of PEM, including process knowledge and repeatability

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