4 Benefits of Biased Target Sputtering

In a traditional ion beam sputtering (IBS) system, there are some drawbacks for applications like VCSELs and vanadium oxide coatings, with the primary concerns being particle generation and contamination. Biased target sputtering (BTS) eliminates these issues, improving yield and ensuring a high film quality.

This infographic explains:

• Why BTS is the ideal solution for addressing contamination and improving film quality
• How to configure a BTS system for co-sputtering
• The 4 major benefits of BTS, including tight control over thin film interfaces

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