6 Benefits of Plasma Emission Monitoring (PEM)
The PEM is a type of in-situ control that manufacturers can use to observe the thin film deposition process and produce more repeatable thin films for their applications.
In this infographic, you'll discover:
- How PEM can be used to increase the yield of metal oxide and nitride thin films during reactive sputtering
- The importance of bistable operation and controlling reactive gas flow during deposition
- The benefits of PEM, including process knowledge and repeatability
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